.jpg)
.jpg)
.jpg)
SI-H100은 흡입식 가스 감지기로 케이스 내부에 있는 센서 카트리지를 통하여 샘플 가스를 원격으로 흡입하여 실시간으로 측정합니다. 반도체나 여러 산업 현장에서 발생할 수 있는 다양한 가스관련 사고(질식, 중독, 화재 및 폭발, 부식 등)를 미연에 방지하거나 관리할 수 있도록 도움을 줄 수 있는 장비입니다.
SI-H100은 장치 내부의 센서 카트리지를 통해 원격으로 샘플 가스를 실시간으로 흡입 및 측정하는 샘플링 타입 가스 감지기입니다. 반도체 및 다양한 산업 환경에서 질식, 중독, 화재·폭발, 부식 등의 가스 사고 예방 및 관리를 돕습니다.
- 센서 교체 시 별도 교정 불필요
- 대형 그래픽 LCD: 직관적인 아이콘 기반 인터페이스 (다양한 상태 표현 가능)
- 아날로그 출력: 농도에 따른 4-20mA / 이상 상태 시 0mA
- 통신 지원: MODBUS, TCP Ethernet 기본 / PoE, RS-485 지원
- 펌웨어 웹 업데이트 가능
- 열분해 장치(Pyrolyzer) 적용 가능 (옵션)
| Model | SI-H100 |
|---|---|
| Dimensions | 123(H) x 65(W) x 155(D) mm |
| Weight | 2kg |
| Operating Voltage | DC : 24V ±10% PoE : 36V~57V (Typical: 48V) |
| Flow Rate | 500mL/min (MAX 900) |
| Power Consumption | Approximately 5.0W |
| Display | Graphic LCD (160x100), Gas concentration, unit, sensor status, Rear light, Device abnormality |
| Alarm | 90dB at 10cm |
| Relay | 1st stage, 2nd stage alarm, Device malfunction |
| Analog Output | Analog, 4–20mA |
| Digital Communication | RS-485, TCP Ethernet |
| Sampling Distance | Distance from device to sampling point: Max 30m (FEP tube) Distance from device to exhaust point: Max 30m (FEP tube) |
| Tubing Standard | 1/4" Teflon tube |
| Operating Temperature | 0°C ~ 40°C |
| Certification | CE |
| Input Settings | 4 Button & RS485 & Ethernet |
| Device Warranty | 2 years |
| Sensor Warranty | 1 year |
| External Interface | Ethernet, RS-485 |
| Wiring | 4–20mA / DC Power / Relay : Cable 14 AWG |
| ETC | Firmware updates are available via our website (http://www.senko.co.kr) |
| Gas | Sensor | Range | Alarm 1 | Alarm 2 | Resolution |
|---|---|---|---|---|---|
| ASH3 | Electrochemical | 0~400 ppb | 25 ppb | 50 ppb | 0.1 ppb |
| B2H6 | Electrochemical | 0~400 ppb | 50 ppb | 100 ppb | 0.1 ppb |
| BCL3 | Electrochemical | 0~10 ppm | 1 ppm | 2 ppm | 0.1 ppm |
| C8H22N2Si | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| BF3 | Electrochemical | 0~8 ppm | 0.5 ppm | 1 ppm | 0.01 ppm |
| BTBAS | Electrochemical | 0~50 ppm | 12.5 ppm | 50 ppm | 0.1 ppm |
| C2H2 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| C2H4 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| C2H6 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| C4F6 | Electrochemical | 0~400 ppm | 130 ppm | 260 ppm | 0.1 ppm |
| C5F8 | Electrochemical | 0~40 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| C6H12 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| C8H18 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| CH2F2 | IR | 0~5000 ppm | 1000 ppm | 2000 ppm | 1 ppm |
| CH3F | Electrochemical | 0~5000 ppm | 1000 ppm | 2000 ppm | 1 ppm |
| CH3OH | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | %LEL |
| CH4 | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| CH4 | IR | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| CL2 | Electrochemical | 0~3 ppm | 0.25 ppm | 0.5 ppm | 0.01 ppm |
| CIF3 | Electrochemical | 0~1 ppm | 0.05 ppm | 0.1 ppm | 0.01 ppm |
| CO | Electrochemical | 0~100 ppm | 15 ppm | 30 ppm | 0.1 ppm |
| COS | Electrochemical | 0~100 ppm | 14 ppm | 28 ppm | 0.1 ppm |
| DCE | Electrochemical | 0~400 ppm | 100 ppm | 200 ppm | 0.1 ppm |
| DCS | Electrochemical | 0~10 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| F2 | Electrochemical | 0~3 ppm | 0.25 ppm | 0.5 ppm | 0.01 ppm |
| GEF4 | Electrochemical | 0~8 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| GEH4 | Electrochemical | 0~800 ppb | 100 ppb | 200 ppb | 0.1 ppb |
| H2 (PPM) | Electrochemical | 0~1000 ppm | 250 ppm | 500 ppm | 1 ppm |
| H2 (%LEL) | Catalytic | 0~100 %LEL | 12.5 %LEL | 25 %LEL | 1 %LEL |
| HBr | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| HCDS / Si2Cl6 | Electrochemical | 0~10 ppm | 2 ppm | 4 ppm | 0.1 ppm |
| HCL | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| HF | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| HMDS / H6H19NSi2 | Electrochemical | 0~400 ppm | 130 ppm | 260 ppm | 0.1 ppm |
| NABAL | Electrochemical | 0~50 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| NF3 | Electrochemical | 0~40 ppm | 10 ppm | 20 ppm | 0.1 ppm |
| NH3 | Electrochemical | 0~100 ppm | 12.5 ppm | 25 ppm | 0.1 ppm |
| NO | Electrochemical | 0~50 ppm | 12.5 ppm | 25 ppm | 0.1 ppm |
| O3 | Electrochemical | 0~400 ppb | 50 ppb | 100 ppb | 0.1 ppb |
| PCp-ZR / (nPrCp)Zr | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| PH3 | Electrochemical | 0~1.2 ppm | 0.15 ppm | 0.3 ppm | 0.01 ppm |
| C5H5N | Electrochemical | 0~10 ppm | 1 ppm | 2 ppm | 0.1 ppm |
| RENA, TEA / C6H15N | Electrochemical | 0~10 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| SiCl4 | Electrochemical | 0~10 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| SiH4 | Electrochemical | 0~15 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| DIPAS (LTO520) | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| HCN | Electrochemical | 0~20 ppm | 10 ppm | 15 ppm | 0.1 ppm |
| 3DMAS (TDMAS) | Electrochemical | 0~10 ppm | 2.5 ppm | 5 ppm | 0.1 ppm |
| TDMAT / C8H24N4Ti | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TEB / (CH3CH2)3B | Electrochemical | 0~50 ppm | 10 ppm | 20 ppm | 0.1 ppm |
| TEOS / SiC8H20O4 | Electrochemical | 0~30 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| Thalassa | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TiCl4 | Electrochemical | 0~15 ppm | 1.3 ppm | 2.6 ppm | 0.1 ppm |
| TMA (AL(CH3)3) | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TMB / C3H9BO3 | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TMS / C3H10OSi | Electrochemical | 0~30 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| WF6 | Electrochemical | 0~6 ppm | 1 ppm | 2 ppm | 0.01 ppm |
| 4MS (Precursor) | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| O2 | Electrochemical | 0~30 %Vol | 19 %Vol | 23 %Vol | 0.1 %Vol |
| H2S | Electrochemical | 0~100 ppm | 25 ppm | 50 ppm | 0.1 ppm |
| SO2 | Electrochemical | 0~8 ppm | 2 ppm | 4 ppm | 0.01 ppm |
| NO2 | Electrochemical | 0~20 ppm | ppm | ppm | 0.1 ppm |
| C3H8 | Catalytic | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| C3H8 | IR | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| CO2 | IR | 0~5000 ppm | 800 ppm | 1000 ppm | 1 ppm |
| IPA | Catalytic | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| C4H8 | Catalytic | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| D2 | Catalytic | 0~100 %LEL | 25 %LEL | 50 %LEL | 1 %LEL |
| SF6 | NDIR | 0~1000 ppm | 200 ppm | 400 ppm | 1 ppm |
| CF4 | NDIR | 0~2000 ppm | 500 ppm | 1000 ppm | 1 ppm |
| COS | NDIR | 0~50 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| TEOS | NDIR | 0~50 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| CH3F | NDIR | 0~5000 ppm | 1000 ppm | 2000 ppm | 1 ppm |
| NF3 | NDIR | 0~50 ppm | 10 ppm | 20 ppm | 0.1 ppm |
| H2O2 | Electrochemical | 0~20 ppm | 5 ppm | 10 ppm | 0.1 ppm |
| HCHO | Electrochemical | 0~5 ppm | 0.6 ppm | 1 ppm | 0.1 ppm |
| CpHf / C11H23N3Hf | Electrochemical | ||||
| CP-ZR (ZAC) | Electrochemical | ||||
| VOC | PID | 0~2000 ppm | |||
| N2O | IR | 0~1000 ppm |
고객지원
KOR
