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SS21S8 Silane Sensor – High-Precision SiH₄ Detection for Semiconductor Safety Systems
SS21S8 is a high-performance electrochemical sensor designed to detect silane gas in the range of 0 to 20 ppm.
It features a linear output of 300 ± 150 nA/ppm, a response time under 50 seconds,
and a resolution below 0.1 ppm, making it ideal for critical industrial monitoring.
With repeatability within ±5%, low long-term drift (<5% per year), and minimal cross-sensitivity to H₂, NO₂, PH₃, and CO,
the sensor delivers reliable measurements in semiconductor manufacturing environments.
It supports operation between -20℃ and +50℃ and has a life expectancy of over 24 months in air.
